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MEMSnet Home: MEMS-Talk: Cr film cracked after lift-off
Cr film cracked after lift-off
2005-10-18
xiaodong wang
Cr film cracked after lift-off
xiaodong wang
2005-10-18
Hi, all,

I am working on a low-k material related project. Cr
(120 nm) was designed for etching mask for low-k
material and following BCB etching. But after
lift-off, Cr was cracked.

Anyone give me some suggestions?

Thanks
reply
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