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MEMSnet Home: MEMS-Talk: Question about metallizations
Question about metallizations
2005-10-18
Christopher Tan
2005-10-18
shay kaplan
2005-10-18
[email protected]
2005-10-18
MT Klaus Beschorner
Question about metallizations
[email protected]
2005-10-18
Aluminum is a vapor at 800C.
Gold is stable up to 600C.
Tungsten is stable at higher temperatures, up to 1000C.

We have applied alloys of W-Ta, W-Ti and others to SiC wafers to get stable
ohmic contacts for operation in sensor that would function at temperatures >
800C.

Rob
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