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MEMSnet Home: MEMS-Talk: AZ4330 Expose
AZ4330 Expose
2005-10-20
PATEL JITENDRA
AZ4330 Expose
PATEL JITENDRA
2005-10-20
I am working with AZ 4330. I will be filling 15 um deep trench using AZ 4330 and
will be exposing the trench area using UV LIGHT, 365nm. As anyone tried this? If
so, can you expose 15 micron of AZ 4330 using 365nm? Thank you

Jitendra Patel
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