Hello evryone..
  I'm attempting to fabricate a MEMS solenoid inductor with a Cr/Cu/Ni plating
base.Is this step correct or should I use  a Ti/Cu/Cr combination.Could some one
please help me out in this matter and if possible also tell me whether DC
sputtering or electroplating would be a good choice to deposit these films?

Thanking you in anticipation.
Mathew