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MEMSnet Home: MEMS-Talk: Compatiablilty of E-beam lithography with polyimide
Compatiablilty of E-beam lithography with polyimide
2005-11-02
Ho Yin Chan
Mask & Wafer provider
2005-11-02
Olivier MILLET
Compatiablilty of E-beam lithography with polyimide
Ho Yin Chan
2005-11-02
Hi all,

Do you have experience on carrying out E-beam lithography on a substrate
which consists of a polyimide layer? Will the E-beam attract the polyimide?

Thanks.

Hoyin

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