Hi, all,

I am working on a project that needs to modify the silicon surface.
Firstly I have a layer coated on the wafer, then spin coat AZ 1518 to
do the lithography. After useing AZ developer, I found the bottom
layer has some defects.
Anyone knows the chemical content of the AZ developer?
Does it deactivate the amin group?

Thanks a lot.

Best,
Jifeng