Jifeng,

That depends on the developer that is being used.  The two most commont
are AZ300MIF (a .26N - 2.38% - TMAH solution in water) and AZ400K (a KOH
based developer).

Best Regards,
Chad Brubaker


-----Original Message-----
From: Jeff chen
Sent: Thursday, November 03, 2005 9:16 AM
To: [email protected]
Subject: [mems-talk] What's the chemical content of the AZ developer?

Hi, all,

I am working on a project that needs to modify the silicon surface.
Firstly I have a layer coated on the wafer, then spin coat AZ 1518 to
do the lithography. After useing AZ developer, I found the bottom
layer has some defects.
Anyone knows the chemical content of the AZ developer?
Does it deactivate the amin group?