95% of developers use Tetramethyl ammonium hydroxide as the active
ingredient. Developers are about 97% DI water 3% TAMOH

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jeff chen
Sent: Thursday, November 03, 2005 10:16 AM
To: [email protected]
Subject: [mems-talk] What's the chemical content of the AZ developer?

Hi, all,

I am working on a project that needs to modify the silicon surface.
Firstly I have a layer coated on the wafer, then spin coat AZ 1518 to
do the lithography. After useing AZ developer, I found the bottom
layer has some defects.
Anyone knows the chemical content of the AZ developer?
Does it deactivate the amin group?