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MEMSnet Home: MEMS-Talk: UV-patterning of
UV-patterning of
2005-11-04
Thorsten Knoll
UV-patterning of
Thorsten Knoll
2005-11-04
Hello!

We want to use Polyvinylalcohol (PVA) as a photoresist (UV-lithography,
i-line, 365 nm).

Is there anybody, who has experience with this process? Maybe there are also
some publications that could help us, but I haven't found them yet...


Thanks in advance,

Thorsten

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