Hello all,

I hear Megasonic baths (>400 Hz) are much better than Ultrasonic baths (25 -100
kHz) for cleaning.
Not only do they remove particulates etc. better they also seem to be more
gentle on structures on samples (e.g. structures in SU-8).
Can anyone comment on this?

Also are there any particularly cost-effective units?
NANO-MASTER Megasonic and  ProSys seem to be two popular manufacturers.


Mark E. Curtis
Graduate Research Assistant
University of Oklahoma
Dept. of Physics and Astronomy