Vacuum caviational streaming is another and will do the least part damage.
But, to get something very cheap you are probably best off finding a
remarket sonic unit as they are everywhere. Vacuum cavitational streaming is
still a little new for that.

I am amazed at how cheap some of these types of things can be on Dovebid,
ebay, etc.

Good luck

Jack

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of
[email protected]
Sent: Friday, November 04, 2005 9:00 AM
To: [email protected]
Subject: [mems-talk] Are Megasonic cleaners really that much better?


Hello all,

I hear Megasonic baths (>400 Hz) are much better than Ultrasonic baths
(25 -100 kHz) for cleaning.
Not only do they remove particulates etc. better they also seem to be more
gentle on structures on samples (e.g. structures in SU-8).
Can anyone comment on this?

Also are there any particularly cost-effective units?
NANO-MASTER Megasonic and  ProSys seem to be two popular manufacturers.