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MEMSnet Home: MEMS-Talk: Deposit passivation layer over SU8
Deposit passivation layer over SU8
2005-11-04
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Deposit passivation layer over SU8
[email protected]
2005-11-04
I just wondering if anyone has experiences to deposit a passivation layer
(oxide, nitride) over SU8. How is the adhesion and any stress issues?
Thanks!

Gene
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