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MEMSnet Home: MEMS-Talk: Protection Layer for SU-8 Structures
Protection Layer for SU-8 Structures
2005-11-07
Silvan Schmid
2005-11-08
walter
2005-11-08
Peter Svasek
Protection Layer for SU-8 Structures
Silvan Schmid
2005-11-07
Dear all,

I have SU-8 structures which I need to cover with a photoresist layer in
order to protect them during the dicing process. The solvent to remove
the protection layer should not alter the SU-8 (e.g. SU-8 will swell in
acetone).
Do you have any experience, which photoresist/developer pair is best
suited for this task?
Thanks!

Regards,
Silvan
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