A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: HD-8820 Polyimide
SiO2 hydrophilic enhanced?
2005-11-07
Wullinger, Michaela
2005-11-07
Shay Kaplan
HD-8820 Polyimide
2005-11-07
Giuliano Gregori
2005-11-08
walter
2005-11-07
ssood
2005-11-07
sokwon Paik
Crosslink PMMA
2005-12-01
[email protected]
2005-12-02
Fabio Altomare
anodic bonding question
2005-12-02
Robert Dean
2005-12-03
Kirt Williams
2005-11-07
Gary
HD-8820 Polyimide
walter
2005-11-08
Greetings,
Yes that will work with virtually any of the HD PI materials.
Some of their older materials are cheaper and work as well.
It takes some experimentation to form the bridge, make sure you have a clean
removal of the PI easier said than done
Kind Regards
Walter
www.elume.com


-----Original Message-----
From: Giuliano Gregori [mailto:[email protected]]
Sent: Monday, November 07, 2005 11:08 AM
To: General MEMS discussion
Subject: [mems-talk] HD-8820 Polyimide

Hi all,
I'd like to use polyimide as sacrificial layer for the fabrication of an
air-bridge.
I'll have to spin it on a SiO2 surface; on part of the top I'll have to
deposit gold and SiO2 again.
I was thinking to use HD-8820 polyimide and I wonder whether this is a
good solution.
Has anybody already used something similar ?   Suggestions ???

Thanks in advance !
Giuliano

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Nano-Master, Inc.
The Branford Group
Process Variations in Microsystems Manufacturing