Dr. Sandoval-Ibarra,
If all you need is a characterization of the deflection at specific points along
the surface, it may be easier for you to use a simple HeNe setup. We have used
such a system at the Air Force Institute of Technology (AFIT) for a number of
years with considerable accuracy on a wide range of devices. With hardware that
you most likely already have, you should be able to obtain approximately a 3µm
spot size with 2nm deflection resolution. It works well with small deflections
(a few wavelengths). However, larger cantilevers that deflect well out of plane
may pose a problem.
If this is of interest to you, I can send you a schematic of the system with
some of the lessons we have learned over the years.
Adrian \\\|/// "Life moves pretty fast. If you don't stop and look
/ _~~~_ \ around, you could miss it!" -- Ferris Bueller
( @ @ )
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| | |
| Capt. M. Adrian Michalicek, USAF | AFRL / VSSE, Building 887 |
| MEMS Program Manager & Engineer | 3550 Aberdeen Avenue SE |
| Phone & Fax: 505-846-4955 & 5815 | Kirtland AFB, NM 87117-5776 |
| Email: [email protected] | http://www.plk.af.mil |
| | |
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____________________Reply Separator____________________
Subject: deflection measurements
Author: "M.C. Federico Sandoval" [email protected]
Date: 5/29/98 9:08 PM
Dear sirs,
In the design of cantilever beams and doubly-supported beams many authors
have been used interferometric techniques to measure the deflection of
those microestructures. Could anyone E-mail me where I can buy an
optical microscope to measure vertical deflection?
Thanks in advance
Dr. F. Sandoval-Ibarra
Microelectronics Laboratory
INAOE, Puebla (Mexico)
Phone: + 52 (22) 47 20 11
Fax: + 52 (22) 47 05 17
