Hi Michaela,

there are two possibilities for increasing the surface energy of top layers.
You can perform either wet chemical cleaning with SC1 and SC2 or you do a
plasma treatment without wet cleaning.
One drawback of the wet cleaning is that the process time is very high
relatively to plasma treatment (wet cleaning with spin drying takes at least
30min whereas a complete plasma process costs you only a few seconds!)
Another handicap of wet cleaning is the less compatibility because of
critical layers on your surface, with the NP12 plasma system this is no
issue.
Our company Suss MicroTec offers such plasma activation system. If you have
further interest please contact me or visit our website.

Best Regards,
Volkan Cetin



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Message: 2
Date: Mon, 7 Nov 2005 18:04:58 +0100
From: "Wullinger, Michaela" 
Subject: [mems-talk] SiO2 hydrophilic enhanced?
To: 
Message-ID:
        <88C52F6AED993B4D9064208594AD36CB0622D1BA@drexch01.EU.PHOTOMASK.COM>
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hi all,
I'm thinking about ways to make SiO2 more hydrophilic.
What do you think about:
*HMDS?
*Temperature (heating)
*Other promoter?

Any hint is welcome

regards
Michaela