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MEMSnet Home: MEMS-Talk: Suggestions needed for handling quartz wafer
Suggestions needed for handling quartz wafer
2005-11-09
Chih-Chieh Cheng
2005-11-09
ssood
2005-11-09
David Nemeth
Suggestions needed for handling quartz wafer
Chih-Chieh Cheng
2005-11-09
Hi, everyone
 I never used quartz wafer as the substrate before and I've heard it is
extremely frangible. Does anyone know the tricks to handle quartz wafer? Do
I need to buy special tweezers for it? How do you clean it? I would be
appreciate it if any of you could share your insights on it. The
specification of my quartz wafer is 3" with thickness=500 um (ttv<10um)
 Regards
 Chih-Chieh
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