Michaela,
        Use a vacuum vapor primer.  The cycles of vacuum purges followed
by hot Nitrogen totally dehydrates the surface.  Then when totally
dehydrated the HMDS vapor bonds to the Hydroxyl ions and gives a
hydrophobic surface that can not be destroyed.  If you use HMDS without
the dehydration step you get a hydrophobic surface with moisture
underneath.  This is a weak point that moisture can and will attack
causing a break down of the surface over time.


Bill Moffat, CEO
Yield Engineering Systems, Inc.
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Wullinger, Michaela
Sent: Wednesday, November 09, 2005 7:07 AM
To: [email protected]
Subject: [mems-talk] Get rid of H2O from Cr and Oxide surface?

hi,
what do you do to get rif of H2O from surface?
I was thinking of applying promoter like HMDS or somethink else?
How can I seal the surface from water adhesion?