Hi!

I wonder if somebody can help me: I am working with the resist BPR100 in
order to get a 100microns thick layer to perform a mask for nickel
electroplating. I am using contact lithography with a MA6 Mask aligner. My
problem is that the resist sticks to my mask everytime i try to expose it.

I manage now to get reasonably flat coatings and I remove the edge bead. i
thought it might be some excess of solvent still in the resist after the
bake so I tried a longer bake (3min on a 65C hotplate followed by a 15min
bake on a 95C hotplate). I have also tried to apply wax to the mask before
to perform the lithography and it still sticks to the mask.....

Anybody has some suggestions!!!

Thanks a lot for your help in advance!

Sonia.