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MEMSnet Home: MEMS-Talk: PDMS photoresist recipe
PDMS photoresist recipe
2005-11-14
sokwon Paik
2005-11-14
Vijay Sivan
2005-11-15
emelianov
2005-11-14
[email protected]
2005-11-15
Vinodh Murali
2005-11-17
[email protected]
2005-11-18
[email protected]
PDMS photoresist recipe
sokwon Paik
2005-11-14
Hi!

Does anybody know the recipe for the PDMS for photoresist?

I want to coat around 2 micro meter and then do the UV exposure.

Please reply me if you know anything about this.

Thanks,

Sokwon Paik
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