Hi, Yu Chen,

   I sputtered SiO2 on top of gold before. SiO2 won't stick well on gold, so
an adhesive layer was required.
   20nm thick Ti layer was used as the adhesive layer in our process.

Richard

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Sent: Wednesday, November 16, 2005 1:14 PM
Subject: [mems-talk] sputter SiO2


> Hello all:
>
> I am going to try sputtering SiO2 on Au to insulate Au, maybe Si3N4.
> does SiO2 stick on Au? or Si3N4 is better?
> do I need to do anything to make it sticky?
>
> I am going to sput SiO2 after e-beam lithography(PMMA as mask).
>
> any suggestions are welcome.