Hi Yu Chen,
I guess, you will need to put down a thin layer of Ti or Cr between Au
and SiO2.
This is what I did and it worked fine for both sputtering and evaporation.
Please, let me know how it goes.

Cheers,
Giuliano


[email protected] wrote:

>Hello all:
>
>I am going to try sputtering SiO2 on Au to insulate Au, maybe Si3N4.
>does SiO2 stick on Au? or Si3N4 is better?
>do I need to do anything to make it sticky?
>
>I am going to sput SiO2 after e-beam lithography(PMMA as mask).
>
>any suggestions are welcome.