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MEMSnet Home: MEMS-Talk: PDMS photoresist recipe
PDMS photoresist recipe
2005-11-14
sokwon Paik
2005-11-14
Vijay Sivan
2005-11-15
emelianov
2005-11-14
[email protected]
2005-11-15
Vinodh Murali
2005-11-17
[email protected]
2005-11-18
[email protected]
PDMS photoresist recipe
[email protected]
2005-11-17
It was WL-5351 Photopatternable Spin-On Silicone (which I always heard referred
to as photo-PDMS). But according to the clarification made by Lydia, the
material is quite chemically different from PDMS.

-Joe


Quoting Vinodh Murali :

> What PDMS photoresist did you use?
>
>   Vinny
>
> [email protected] wrote:
>   Hi Sokwon,
>
> I got photodefinable PDMS from Dow a couple months ago and they provided me
> with the processing instructions. I suggest you just contact the manufacturer
>
> of your PDMS photoresist and they should be able to give you the appropriate
>
> instructions.
>
> good luck,
> Joe Grogan
reply
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