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MEMSnet Home: MEMS-Talk: Bias line material for RF MEMS switch
Bias line material for RF MEMS switch
2005-11-18
Chih-Chieh Cheng
Bias line material for RF MEMS switch
Chih-Chieh Cheng
2005-11-18
Hi, everyone
 Has anyone ever fabricated RF MEMS switches? what kind of material were you
used for bias line? SiCr might be a choice but does anyone know the specific
weight of Si and Cr for the sputter target ? for example, Si(50%): Cr(50%)?
 Thanks for your response
 Chih-Chieh
reply
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