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MEMSnet Home: MEMS-Talk: Thinning Polyimide
Al wire-bond
2005-11-20
Lung-hao Hu
2005-11-21
Kirt Williams
Thinning Polyimide
2005-11-20
Lung-hao Hu
Thinning Polyimide
Lung-hao Hu
2005-11-20
I wanna use NMP, DMAc, DMSO or DMF to thin polyimide
Is there any one wno can provided me the relationship between the thickness of
thinned polyimide with different ratio of thinner and polyimide, and the spin
speed.

Lawrence L.H Hu

Dept.of Mechanical Engineering
Univ.of Colorado Boulder
UCB 427 CO 80309
Email:[email protected]
Tel:303-786-1702(H)
    303-492-0877(Lab)
Fax:303-492-3498

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