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MEMSnet Home: MEMS-Talk: PDMS binding to GLASS
PDMS binding to GLASS
2005-11-19
suppi
2005-11-19
[email protected]
2005-11-20
karim faid
2005-11-21
Lee Pang
2005-11-21
Beggans Michael H IHMD
PDMS binding to GLASS
Lee Pang
2005-11-21
Method 1:  Acid Treatment
This is actually a reversible bond, but is capable of holding upto
5-8psi of applied pressure.

  - Stir PDMS chips in warm (50-80C) 0.1N hydrochloric acid for 2hrs
  - Treat glass similarly but at room temp
  - Rinse treated surfaces in 0.2um filtered deionized water
  - Dry with air or N2
  - Bring treated surfaces into intimate contact
  - Anneal bond in an 80C oven for at least 4hrs (preferrably overnight)

Method 2:  Flame Treatment
I have some consistency issues with this --- e.g. it works about 75% of
the time.  I haven't tested this method enough to figure out why it
works.  The bond is irreversible when it does work.

  - Solvent clean both PDMS and glass surfaces to be bonded (Acetone ->
Methanol -> Repeat 2x and dry with Air or N2)
  - Pass both surfaces 8-10x through a flame --- hold about 0.5" above
the bluest part of a bunsen burner.  Each pass should not be more than
0.25s of dwell time in the flame
  - Allow surfaces to cool (1-5min)
  - Bring surfaces into intimate contact
  - Let cure at RT overnight

Hope this helps

Lee

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