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MEMSnet Home: MEMS-Talk: Polyimide remove
Polyimide remove
Polyimide thinner
2005-11-19
Lung-hao Hu
2005-11-23
Lung-hao Hu
2005-11-23
[email protected]
2005-11-23
Michael D Martin
Polyimide remove
Lung-hao Hu
2005-11-23
How to remive the fully or soft-bake polyimide but not use O2 plasma, because I
pattern a gold layer and I don't want to attack it.
Can I use any strong acid or base to remove it?

Lawrence L.H Hu
Dept.of Mechanical Engineering
Univ.of Colorado Boulder
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