A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Pyramids on 111sidewalls when etching 100 Si in KOH
Pyramids on 111sidewalls when etching 100 Si in KOH
2005-11-24
GARCIA BLANCO Sonia
Pyramids on 111sidewalls when etching 100 Si in KOH
GARCIA BLANCO Sonia
2005-11-24
Hi!!

I am working in etching of silicon using KOH+IPA. I have oriented my
structures along the 110 plane direction (perpedicular to the flat) and I
obtain walls  at 54.7 degrees. I assume that they are the 111 planes of
silicon.

My problem is that on these planes I observed the formation of pyramids. I
have used strong stirring and ultrasounds. I also tried using surfactants
(Triton-x-100). But I am always obtaining these structures.... I havent seen
pyramids like that on the papers so I was wondering if somebody has had this
experience before and how did they manage to get rid of the pyramids..... I
was supecting that it could be some etch of the 111plane, maybe the 122
planes?? but I dont know how to avoid them appearing.

Thanks a lot for your help!

Have a nice afternoon!

Sonia.

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
MEMS Technology Review
MEMStaff Inc.
Addison Engineering