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MEMSnet Home: MEMS-Talk: Wafer Needed
Wafer Needed
2005-11-26
Tao
Wafer Needed
Tao
2005-11-26
Dear members,
    This question maybe should not be asked here. But I checked lots of
wafer vendor websits and didn't find the right one for me. I hope anyone
can provide soem information. I will appreciate that very much. Thanks.
Requirement:
    Diameter:               2 or 3 inch
    Type:                     N-Type
    Doping:                  PHOPHORUS
Orientation:                110
Resistivity:            1~5 ohm cm
Thickness:              standard  (I hope it's between 100um ~ 300um)
Polish:                 Two-Side
Grade:                TEST or PRIME (doesn't really matter if the price
is affordable)
Quantity:               25

Two things  I think I may consider. I will need to etch the wafer. In
order to save my time, I prefer a thin one (~200um will be best) with
still an affordable price. That's the reason I ask for 2in wafer.
Usually it has a smaller thickness. I also hope the dopants (PHOSPHORUS)
concentration is between 10^(15) ~ 10^(16) cm^(-3), which means a
resistive coefficient between 0.6~4 ohm cm. Of course it is not so
strictly required. But I still hope the resistivity is in the order of 1
ohm cm. This special requirement is because of my application. Indeed
2in or 3in is not important, only if the price is affordable.
Thanks!

HTao
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