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MEMSnet Home: MEMS-Talk: Carbon evaporation for electrochemical sense electrodes
Carbon evaporation for electrochemical sense electrodes
2005-11-28
Michael D Martin
Carbon evaporation for electrochemical sense electrodes
Michael D Martin
2005-11-28
Does anyone have experience E-beaming graphite for electrochemical
applications? What crucible type is appropriate? We checked the
evaporation guide from Lesker but it has no suggestions for crucible
material. We have tried using a graphite crucible which the student
promptly burned through. No major damage thankfully. Initially we plan
on depositing onto Pyrex slides but may end up using silicon. Are there
any tips/tricks you care to offer up in order to get reasonable
electrochemical behavior from said electrodes?

Thanks in advance,
   Mike Martin
   U. of Louisville
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