Jing,

You would probably want to look at the manufacturer recommended release
layer, called "Omnicoat".

You should be able to find information about it at www.microchem.com


Best Regards,
Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel:  480.727.9635, Fax:  480.727.9700  e-mail:
[email protected], www.EVGroup.com

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Jing Xue
Sent: Monday, November 28, 2005 3:24 PM
To: [email protected]
Subject: [mems-talk] sacrificial layer between si/pyrex wafer and Si and
notadhere to Su-8

Dear all,

I am looking for a materail which can be used as a sacrificial layer
between Si or pyrex wafer and Si, and doesn't adhere to Su-8. Can
anyone give me a help on this?

detailedly, I want to deposit a layer (? material) on Si/pyrex
substrate, which will has good surface flatness and doesn't adhere to
SU-8, and then I bond them with another Si wafer, after several
process, the bottom Si wafer (with scrifical materal on it) can be
released from the top Si wafer.

It's better to have higher temperature tolerance, but around 250C is ok.

Teflon is a good candidate?