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MEMSnet Home: MEMS-Talk: the highest Al deposition rate using egun?
MEMS Optical Sensors !!!
2005-11-25
Imran Ghauri
the highest Al deposition rate using egun?
2005-11-29
Andrew Xiang
the highest Al deposition rate using egun?
Andrew Xiang
2005-11-29
Anyone has experience on the highest Aluminum deposition rate that you can
achieve with egun without spitting and bubbling that can contaminate your
process? Distance from source to target is about 400mm. We are doing it very
slow <10A/s now. However, we want to achieve 50-100A/s if possible. Egun max
power is 15kw and has sweeping control.

thanks
Andrew

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