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MEMSnet Home: MEMS-Talk: Fabrication of Au structures on mica
Fabrication of Au structures on mica
2005-11-30
Jeff Kettle
2005-11-30
David Nemeth
回复: [mems-talk] Fabrication of Au structures on mica
2005-12-01
jx liang
Fabrication of Au structures on mica
Jeff Kettle
2005-11-30
Hi all,

Has anyone ever tried fabricating Au patterns on mica?

We have patterned using a mask aligner 2 electrodes with a gap in between each
electrode of 5um only to find the thermal evaporation of 5nm Cr/40nm Au after
lift-off doesn't adhere well, leaving very rough edges where the edges should be
straight. The photolithography stage goes well. If anyone has any ideas or
experience working with au/mica, we'll be grateful.

Cheers,

Jeff kettle
Cardiff University


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