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MEMSnet Home: MEMS-Talk: Gold etching
Gold etching
2005-11-30
Sebastien Allard
2005-12-01
Zhang Peng
2005-12-01
Shay Kaplan
2005-12-01
Michael D Martin
2005-12-02
Sebastien Allard
2005-12-02
Bill Moffat
2005-12-02
Sebastien Allard
2005-12-02
David Nemeth
2005-12-05
Manish Hooda
2005-12-02
[email protected]
Gold etching
Sebastien Allard
2005-11-30
Hello,

I'm trying to remove a 15 micron thick layer of gold over silica glass.  I have
some TFA old etch from Transene, but it takes a long time (1 hour) to do the job
- I would like to reduce the etch time to about 2-3 minutes.  Besides Aqua
Regia, what are the other solutions I could experiment with that could etch
faster?

I know aqua regia should do the job, but I would have to buy the nitric and
chloridric acids and I'm not sure which grades are best for this - any hints on
what acid concentrations and grades of HCl HNO3 to use in order to etch 15
microns of Au in 2-3 minutes?

Thanks,

Sébastien Allard
------------------------------------------
R&D Process Engineer
LxSix Photonics


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