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MEMSnet Home: MEMS-Talk: ZnO etch?
ZnO etch?
2005-12-01
Matthew Coda
Bi2O5 etch
2005-12-01
biplab roy
ZnO etch?
Matthew Coda
2005-12-01
G'day all,

I'm looking for a wet chemical zinc oxide etch process.  Ideally it would
not etch silver and/or gold but so long as the Au/Ag etch rate isn't more
than the ZnO rate I can work with it.  Any suggestions?

Thanks,
Matt
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