Hello colleagues,

from my experience, the uncured RTV silicones can be good dissolved in
Hexane and Toluene (I'm working with this solvents) or in
Hexamethyldisiloxan (I have no check it yet!). By Dow Corning and GE
Silicones you can found a lot of special fluids for your approach. Some of
the PDMS can be photopatternable (for example Dow Corning WL-5351).
The curried PDMS layers can etch with RIE plasma in O2+CF4 atmosphere. Let
you see the following paper:
"Dry etching of polydimethylsiloxane for microfluidic systems", Garra, J. et
al., Journal of Vacuum Science Technology, Volume 20, Issue 3, pp. 975-982
(2002).

But the general questions are:
Witch PDMS you have?
How thick is your layers?
Are you need to patternate your layers?

Best regards,

Vitali Emelianov

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caesar research center
Ludwig-Erhard-Allee 2
53175 Bonn Germany

phone:  +49-228-9656-342
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-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von David Henriks
Gesendet: Friday, December 16, 2005 17:58
An: General MEMS discussion
Betreff: Re: [mems-talk] How to clean PDMS

Jason:

I saved this from a previous posting on this listserver:

Hi. I have used PDMS from GE Electronics (RTV 615). And I have been using
Dynasolve 210 (Dynaloy, Inc.) to dissolve the PDMS I used. It took about
less than 1 hour to dissolve 500 um thick PDMS. Let me know if you have any
questions. Regards. ================================= Sang Won Park Graduate
Research Assistant Erik Jonsson School of Engineering and Computer Science
The University of Texas at Dallas Richardson, TX
75083-0688 972-883-2893, [Fax] 972-883-6839 [E-mail] [email protected]
 [Web] http://www.utdallas.edu/~spark


There is also an archive of information concerning this at:

http://s-chung.com/bbs/zboard.php?id=PDMSfab&page=1&sn1=&divpage=1&sn=off&ss
=on&sc=on&select_arrange=name&desc=desc

I hope that helps!

Best regards-

David

David Henriks

South Bay Technology, Inc.