A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Boron implantation/thermal diffusion
Boron implantation/thermal diffusion
2005-12-19
Vinay
2005-12-19
Tao
2005-12-23
[email protected]
2005-12-20
Roger Brennan
2005-12-21
bob hou
2005-12-23
[email protected]
2005-12-22
[email protected]
2005-12-22
[email protected]
Boron implantation/thermal diffusion
Vinay
2005-12-19
Hello All,
We are trying to perform boron diffusion on silicon and hoping to achieve
depths in the range of 20 to 25um. I spoke to a couple of companies who do
ion implantation and they suggested i go with thermal diffusion of boron as
against ion implantation. What do you guys think? Any suggestions or
comments would be greatly appreatiated.

Thanks,
vinay
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Mentor Graphics Corporation
University Wafer
Tanner EDA by Mentor Graphics