A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: AW: [mems-talk] How to clean PDMS
Re: AW: [mems-talk] How to clean PDMS
2005-12-19
[email protected]
Re: AW: [mems-talk] How to clean PDMS
[email protected]
2005-12-19
> Hello all,
>
>
>
> Thanks for those who gave me all these informations.
> I should have made my question more clear. I have a cured PDMS (sylgard 184)
> from Dow Corning on Si substrate. However there are grooves about 60um, which
I
> made from DRIE. I want to remove the PDMS out of the grooves completely
because
> I want to re-use the Si substrate. So far, it seems that the easiest way is to
> use "Dynasolve 210 (Dynaloy, Inc.)". However, I check the company's website,
it
> did mention about RTV but it does not say about DowCorning. Anyway, I send the
> email to the company. Hopefully I will get reply soon. Thank you all.
>
>
> Jason,
>
>
>


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Mentor Graphics Corporation
Process Variations in Microsystems Manufacturing
Addison Engineering