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MEMSnet Home: MEMS-Talk: Removing of Polycarbonate (PC)
Removing dry resist
2005-12-21
Sven Holmström
2005-12-21
ckyang
2005-12-21
Shile
2005-12-22
Sven Holmström
2005-12-23
Robert Black
2005-12-23
Jesse D Fowler
Removing of Polycarbonate (PC)
2005-12-25
Daniel Park
2005-12-21
Jauniskis, Linas
2005-12-22
Prem Pal
Removing of Polycarbonate (PC)
Daniel Park
2005-12-25
Hello, all.

I am working on hot embossing of polycarbonate (PC) using metal mold
inserts. Unfortunately, during moldoing process, PC got broken and stuck in
small holes (10 by 10 um in 60 um deep holes). I am looking for a wet
removal or dry removal method for polycarbonte.

If any of you know, please let me know. Your help will be greatly
appreciated.

Daniel Park
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