A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Spin a very thin layer of PR
Spin a very thin layer of PR
2005-12-30
Lung-hao Hu
2005-12-31
Masahiko Takei
Spin a very thin layer of PR
Lung-hao Hu
2005-12-30
If I spin a very thin layer PR, will I observe lots of micro-dots on the
substrate due to the surface tension??
I just tried to use Polyimide mixing with thinner 1:4 and spin at 4000rpm for
40s on a glass slide.
But it seems not what I want.

Is there anyone who did this experiment before??

Lung-hao Hu

Graduate Student
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
Mentor Graphics Corporation
MEMStaff Inc.