Hi Frederic,
   You are probably getting some redepostion of metal oxide particles
on the surface. You can confirm this with EDAX. Is it possible to
perform a wet etch instead of sputtering the metal off?

-Mike Martin
 U. of Louisville

>>> [email protected] 01/09/06 9:41 PM >>>
dear list,

Does anybody knows why there is always a white layer covering patterns

after RIE of samples composed by three layers
S18-05 (up) - Silica (middle) - metal (down)
on a glass support, and eventually how to avoid such white layer (I
supposed it comes from S18-05 etching...)

We have used first CHF3, then O2 to remove the remain S18-05, and then

O2 and Ar to etch the metal.