From: Padmanabhan Aravind on Mon, Jun 15, 1998 12:15 PM
Subject: Info on HiPox......
To: [email protected]

Hello Fellow MEMS Researchers,
                                                    I am looking for information
on
any vendor service for high-Pressure oxidation (less than 700 C,
pressure flexible). The wafers need to be brought back into the
fab after the HiPox step.
Any inputs would be appreciated. Thanks.

--Aravind

Aravind Padmanabhan
Honeywell Technology Center
Plymouth, MN 55441