Dear MEMS community,
does anyone know of a TaON Chemical etchant ?
TaON is Tantale oxynitride
Thanks in advance
Eric
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Eric Bonnotte
Schlumberger Wireline and Testing
SRPC- Clamart
26 rue de la cavee
92140 Clamart
FRANCE
Tel : +33 (0)1 45 37 22 95
Fax : +33 (0)1 45 37 26 93
email : [email protected]
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