MEMS-talk

News	MEMSnet Home: MEMS-Talk: polyimide dry-etch polyimide dry-etch 2006-01-25 Giuliano Gregori 2006-01-26 Vinayak Shamanna 2006-01-25 Bill Moffat Suitable application for a double chamber micropump 2006-01-27 mohammad abdul polyimide dry-etch Giuliano Gregori 2006-01-25 Hello everybody, what's a good process to dry-etch a HD 8820 polyimide sacrificial layer 2-3 micron thick ? Thanks in advance ! Giuliano reply
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