A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Protecting coating of Al in HF
RIE of SiN
2006-02-01
Ron Linklater
Protecting coating of Al in HF
2006-02-01
Bin Liu
2006-02-02
gatty hithesh
Al etchant attack PMMA?
2006-02-02
Hongjun-ECE
2006-02-02
Brent Garber
2006-02-03
Manish Hooda
2006-02-03
Pradeep Dixit
2006-02-04
[email protected]
Protecting coating of Al in HF
Bin Liu
2006-02-01
Dear all
i am looking for a physical coating for Aluminum so that it wont be
attack by 49%HF while releasing MEMS. My aluminum is about 70nm thick
which is used to be a reflective layer. or, if you have other
suggestions of protection I will appreciate, too!

yours
Bin
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
MEMStaff Inc.