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MEMSnet Home: MEMS-Talk: make rough SU-8 surface
make rough SU-8 surface
2006-02-14
[email protected]
2006-02-15
Dirk Eicher
2006-02-15
Peter Svasek
2006-02-16
Richard
make rough SU-8 surface
[email protected]
2006-02-14
Hi,

Does anybody know how to roughen SU-8 (crosslinked) surface by either dry etch
or wet etch? I want to improve the adhesion between metal and su-8 in the
following plating procedure.

Many thanks!

Chao
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