Try Ammonium Hydroxide I have used this in the past in dilute solution to
predictably roughen polished silicon wafer surfaces.

 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Duan
Sent:   Wednesday, March 01, 2006 7:51 AM
To:     General MEMS discussion
Subject:        [mems-talk] How to get rough silicon surface ?

Hi all,

Does someone know how to get rough silicon surface? in micron size.

I searched the reference, and know the black silicon method might work. And
someone said that they observed black silicon surface after wet etching.  I
want to know some details about it, like the sample preparation, the
experimental condition and the exact roughness of the sample surface.

any reply and any information is appreciated.

Duan