Hi Loren,

Could you give me more details, like the concentration?  Thanks a lot.

Duan

On 3/1/06, Loren St. Clair  wrote:
> Try Ammonium Hydroxide I have used this in the past in dilute solution to
predictably roughen polished silicon wafer surfaces.
>
> -----Original Message-----
> From:   [email protected] [mailto:[email protected]]
On Behalf Of Duan
> Sent:   Wednesday, March 01, 2006 7:51 AM
> To:     General MEMS discussion
> Subject:        [mems-talk] How to get rough silicon surface ?
>
> Hi all,
>
> Does someone know how to get rough silicon surface? in micron size.
>
> I searched the reference, and know the black silicon method might work. And
> someone said that they observed black silicon surface after wet etching.  I
> want to know some details about it, like the sample preparation, the
> experimental condition and the exact roughness of the sample surface.
>
> any reply and any information is appreciated.