James,

Good to hear from you and your experiences with our new SU-8 3000
product. All your questions are valid and will be answered with
respect...

In terms of being able to understand your specific problem I do need to
have your complete processing information, especially the exposure doses
used, as well as an understanding of the film thickness to determine if
the bake times are sufficient. For example if you are using the SU-8
3050 and trying to get a FT of 50um then the recommended dose at 365nm
with a UV filter will be ~ 200mJ/cm^2...the recommended filter is the
PL-360 LP from Omega Optical....

The exposure dose stated above is for Silicon as a substrate and when
being used on a seed layer the dose required can be in the range 1.5 - 2
X the dose required for Si....Have you performed an exposure matrix to
see what the optimum dose for your aligner and resist film combination
is ?

I hope this helps and if you have anymore questions please contact me
directly.

Best regards to you and Tom...

------------------------------------
MicroChem Corp.
Mark Shaw
Epoxy Business Unit - Sales and Technical Support Manager
[email protected]
1254 Chestnut Street
Newton, MA 02464
tel: 617-965-5511 ext 308
fax: 617-965-5818
mobile: 617-407-9490
www.microchem.com
------------------------------------




Message: 7
Date: Wed, 8 Mar 2006 09:11:15 -0000
From: "James Zhu" 
Subject: [mems-talk] Problems due to poor SU8 adhesion to metal
        surface
To: "General MEMS discussion" 
Message-ID:
        
Content-Type: text/plain;       charset="us-ascii"

Dear all,

I am new in this field and also this community.I am probably asking some
silly questions. Thanks for any help in advancen anyway.
I used SU8 3000 Series spin coated on nickel or silver surface. It was
followed by pre-bake for 11 mins at 95 C, exposure 7sec, PEB 1 mins @65C
+ 4 min @95C and develop. Everything is ok until  electroplating in
copper (strong acid) or gold bath (strong basic) simply because Su8
layer detached from the metal surface. Can anybody please give me some
advice to overcome or just let me know ther it is a unsolved problem.