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MEMSnet Home: MEMS-Talk: Spinning AZ4903 Photoresist
Spinning AZ4903 Photoresist
2006-03-23
Po-Jui Chen
2006-03-23
abdou sar
Spinning AZ4903 Photoresist
Po-Jui Chen
2006-03-23
Hi all,

I recently started to try AZ4903 photoresist in order to coat thick PR
films. I found that it is much more viscous than other types such as
AZ1518, AZ4620, so I always had bubbles when dispensing the
photoresist directly by pouring it on wafers. Do you any suggestions
about the best way to dispense it? Our spinner does not have a spray
function so this method is not available...

Thanks,
PJ

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